Helium leak detection in semiconductor factories
Smartphone, tablet, games console, navigation system, flatscreen – those and many other hightech products only exist thanks to the semiconductor industry. Without it, the memory chips and processors used in modern communication media could not be produced.
For their manufacture, extremely clean vacuum conditions are needed, which have to be monitored precisely. For example, a leak test is conducted in form of a measurement of pressure rise after having maintained a semiconductor production facility – known as “fab”. Only if the tightness of the system is approved, the process is being released. If the pressure rise is larger than a defined threshold value, the fab is closed and the leak detection started to localize a leak and repair it. With its broad service portfolio, Pfeiffer Vacuum provides optimal support by experts – even for on-site leak detection.
Take a glance at a typical on-site service of one of our service engineers:
Helium leak detection for testing the production environment
“More than 5 milliTorr, I am going to get the leak detector!” Eyck Schwarz is a service engineer at Pfeiffer Vacuum. He supports the operators of a large semiconductor provider with vacuum equipment and leak detection on-site. Today, a system for the dry etching of polycrystalline silicone has to be restarted after a standard maintenance.
Read more about this state of the art technology in the attached application report.
Should you have any further question, do not hesitate to contact us.
